The Role of sputter etching and annealing processes on the formation of -FeSi thin films

Shimura, Kenichiro; Katsumata, Toshinobu*; Yamaguchi, Kenji; Yamamoto, Hiroyuki; Hojo, Kiichi

Thin Solid Films, 461(1), p.22 - 27, 2004/08

https://doi.org/10.1016/j.tsf.2004.02.053

On the formation of -FeSi using Ion Beam Sputter Deposition (IBSD) method, sputter etching (SE) followed by thermal annealing is effective substrate treatment to obtain highly (100) oriented -FeSi on Si (100). However the best condition of these treatments are not yet known. In this work, the effect of sputter etching (SE) together with annealing process on the orientation of the film is investigated. In prior to the deposition of Fe, the substrate is irradiated by Ne ion with various energy and fluence followed by thermal annealing at 1027 K for 60 minuets. The overall results show the most suitable SE condition using Ne ion on IBSD method is the energy of 1keV with the fluence of 3010 ions/m.

Status of superconducting heavy-ion booster-linac at JAERI

Takeuchi, Suehiro

KEK Proceedings 2000-23, p.16 - 20, 2001/02

no abstracts in English

Present status of superconducting cavity development for high intensity proton linac

Kusano, Joichi; Ouchi, Nobuo; Akaoka, Nobuo*; Tomisawa, Tetsuo; Takeuchi, Suehiro; Mizumoto, Motoharu; Noguchi, Shuichi*; Saito, Kenji*; Inoue, Hitoshi*; *; et al.

Proceedings of 23rd Linear Accelerator Meeting in Japan, p.124 - 126, 1998/00

no abstracts in English

Development of laser decontamination; Research and fundamental experiment

Fukui, Yasutaka; ; Tanimoto, Kenichi; Terunuma, Seiichi

PNC TN9410 95-041, 171 Pages, 1994/12

PNC-TN9410-95-041.pdf:11.32MB

As the material is irradiated by laser beam, its surface is instataneously heated and ablation. the contaminant in surface layer of radioactive wastes will be decontaminated, provided that such the physical phenomenon is used of decontamination technique. The applicability with decommissioning of laser decontamination technique are investigated by the research of the associated laser techniques and the removing test with metal surface. The results of the research and the test is as follows. (1)The research of laser decontamination. On the YAG and the eximer laser beam, there were some study reports of the decontamination, with the metal and the concrete. The structural material. the biological shield, and the waste strage vessel, these objects were regarded as the objects of the laser decontamination. (2)The removing test of the metal surfacc by lascr beam. The removing performance was examined by irradiating line forcused YAG laser beam with the stainless steel surface. The average removal depth rose, in proportion the product of the energy beam density and the number of beam pulse in He atomosphere. The removal depth was obtained more than 1m, in condition of the laser beam energy was 400mJ and the moving velocity of the test piece was 0.25mm/sec. About 65% of the ablation products were collected, by the simple absorbing system of the open type. (3)Future plan. It is necessary, Examining the removing performance and the variable property of the removal surface, investigating the decontamination technique of the large area and the collecting technique of the ablation products, and so. Thereafter the application to the decontamination will be studied.

None

Kawamura, Kazuhiro

PNC TN8600 92-001, 86 Pages, 1992/01

PNC-TN8600-92-001.pdf:4.7MB

no abstracts in English

Shieldes Electron Microprobe Analyzer for Plutonium Fuel

; ; ; ; ; *

JAERI-M 8322, 45 Pages, 1979/07

JAERI-M-8322.pdf:2.42MB

no abstracts in English

Effect of post heat treatment on corrosion resistance of surface modified material for thermochemical water-splitting process

Ioka, Ikuo; Kuriki, Yoshiro*; Iwatsuki, Jin; Kubo, Shinji; Inagaki, Yoshiyuki; Sakaba, Nariaki

no journal, , 

A hybrid material with high corrosion resistance for boiling sulfuric acid has been developed for IS process. To improve the corrosion resistance of the hybrid material, the specimen was treated with a post heat treatment. The specimen got superior corrosion resistance in the condition of boiling sulfuric acid.